Semiconductor Physics, Quantum Electronics & Optoelectronics. 2003. V. 6, N 1. P. 41-46.
PACS: 61.10.Kw, 61.43.Hv, 68.35.-p
Determination of surface
parameters of solids by methods of X-ray total external reflection
Chernivtsi National University, street Kotsubynsky,
2, Chernivtsi, 58012, Ukraine
Abstract. The series of GaAs and SiO2 samples with the specially prepared one- and two-dimensional surface reliefs have been investigated by the methods of integral and differential curve total external reflection of X-rays. The direct and inverse problem was solved, taking into consideration data obtained by the method of atomic-force microscopy: the theoretical curves of total external reflection are calculated and parameters describing a surface relief of the samples are restored.
Keywords: total external reflection of X-rays, surface relief, rocking curves, fractals.