Semiconductor Physics, Quantum Electronics & Optoelectronics. 2011. V. 14, N 1. P. 059-061.
Optical properties of ion implanted thin Ni films on lithium niobate
1V. Lashkariov Institute of Semiconductor Physics, NAS of Ukraine,
41, prospect Nauky, 03022 Kyiv, Ukraine Abstract.
Ion implantation by keV Ar + ions creates blisters on the surface of thin Ni
films deposited on lithium niobate and causes changes in optical properties and structure
of Ni film and lithium niobate substrate. Processes of ion implantation and effects of
increasing absorption, adhesion, damage threshold are described and explained in the
paper. Development of pyroelectric photodetector “thin Ni film – lithium niobate” is
proposed.
Keywords: ion implantation, thin Ni films, lithium niobate, optical properties.
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