Semiconductor Physics, Quantum Electronics & Optoelectronics. 2015. V. 18, N 1. P. 026-030.
https://doi.org/10.15407/spqeo18.01.026


                                                                 

References

1.    A.V. Sokolov, Optical Properties of Metals. GIFML, Moscow, 1961 (in Russian).
 
2.    M.M. Noskov, Optical and Magneto-optical Properties of Metals. Fizmatlit, Sverdlovsk, 1983 (in Russian).
 
3.    L.V. Poperenko, V.S. Stashchuk, I.A. Shaykevich, V.A. Odarych. Surface Diagnostic by Polarized Light. Kyiv University Publ., Kyiv, 2007 (in Ukrainian).
 
4.    I.N. Shkliarevsky, V.P. Kostiuk, V.R. Karas, Surface films influence on magneto-optical measurements data. Optika i spectroskopiya, 23(1), p. 147-152 (1967), in Russian.
 
5.    R.W. Collins, I. An, H.V. Nguyen, Y. Lu, Real time spectroscopic ellipsometry for characterization of nucleation, growth and optical functions of thin films. Thin Solid Films, 233, p. 244-247 (1993).
https://doi.org/10.1016/0040-6090(93)90100-4
 
6.    M. Fried, H. Wormeester, E. Zoethoud, T. Lohner, O. Polgar, I. Barsony, In situ spectroscopic ellipsometric investigation of vacuum annealed and oxidized porous silicon layers. Thin Solid Films, 459, p. 313-314 (1998).
https://doi.org/10.1016/s0040-6090(97)00864-x
 
7.    W. Lehnert, P. Petric, C. Schneider, L. Pfitzner, H. Ryssel, In situ layer characterization by spectroscopic ellipsometry at high temperatures. ULSI Conference at NIST (1998).
 
8.    V.A. Antonov, V.I. Pshenitsyn, Polaryzed light reflection by rough surface. Optika i spektroscopiya, 56(1), p. 146-154 (1984), in Russian.
 
9.    A.V. Rzhanov, S.N. Svitasheva, K.K. Svitashev, Determination of ellipsometric data of rough surfaces by graphical technique. DAN USSR, 273(5), p. 1123-1126 (1983), in Russian.
 
10.    S. Logothetidis, Surface-roughness and grain-boundary effects on the optical properties of low-pressure chemical-vapour-deposited silicon thin films by spectroscopic ellipsometry. J. Appl. Phys. 65, p. 2416 (1989).
https://doi.org/10.1063/1.343401
 
11.    S.J. Fang, W. Chen, T. Yamanaka, C.R Helms, Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry. Appl. Phys. Lett. 68, p. 2837 (1996).
https://doi.org/10.1063/1.116341
 
12.    C. Flueraru, N. Gartner, C. Rotaru, D. Dascalu, G. Andriescu and P. Cosmin, Spectro-ellipsometric investigation of polycrystalline silicon surface roughness. Microelectron. Eng. 31, p. 309 (1996).
https://doi.org/10.1016/0167-9317(95)00353-3
 
13.    M. Born and E. Wolf, Principles of Optics. Nauka, Moscow, 1970 (in Russian).
 
14.    E.D. Palik, Handbook of Optical Constants of Solids. Academic Press London, Boston, New York, 1998.
 
15.    Z.G. Meyksin, Non-solid and Cermet Films in Thin Films Physics. Mir, Moscow, 8, p. 106-179 (1978), in Russian.