Semiconductor Physics, Quantum Electronics and Optoelectronics, 20 (1) P. 091-095 (2017).
DOI: https://doi.org/10.15407/spqeo20.01.091


References

1. Sangwal K. Etching of Crystals: Theory, Experiment, and Application. Amsterdam: Elsevier, 1987.
 
2. Oliver M.R. Chemical-mechanical Planarization of Semiconductor Materials. Springer, 2004. P. 524.
https://doi.org/10.1007/978-3-662-06234-0
 
3. Gol'dshteyn R.V. Chemical-mechanical polishing. Part 1. Basic regularities: a review. Vestnik Permskoho universiteta. Mekhanika. 2011. 3. P. 26–42 (in Russian).
 
4. Luft B.D., Perevoshchikov V.A., Vozmilova L.N., Sverdlin I.A., Marin K.G. Physical-Chemical Methods of Semiconductor Surface Treatment. Moscow: Radio i Svyaz', 1982. 136 p. (in Russian).
 
5. Walker P., Tarn W.H. Handbook of Metal Etchants. CRC Press LLC, 1991.
 
6. Danilova M.G., Sveshnikova L.L., Repinskii S.M. The electrode behavior of lead telluride in alkaline solutions of hydrogen peroxide. Elektrokhimiya. 1990. 26, No. 6. P. 788–790 (in Russian).
 
7. Tomashyk Z.F., Malanych G.P., Tomashyk V.M., Stratiychuk I.B., Pashchenko G.A., Kravtsova A.S. Polishing of PbTe and Pb1–xSnxTe single crystals with H2O2–HBr–ethylene glycol bromine-emerging etchants. Voprosy Khim. Khim. Tekhnol. 2012. 4. P. 120–125 (in Ukrainian).
 
8. Malanych G.P., Tomashyk Z.F., Tomashyk V.M., Stratiychuk I.B., Safryuk N.V., Klad'ko V.P. Chemical–mechanical polishing of single crystals of PbTe and Pb1–xSnxTe solid solutions in H2O2–HBr–ethylene glycol etchants. Naukovyi Visnyk Chernivets'koho Natsional'noho Universitetu. Khim. 2013. 640. P. 72–78 (in Ukrainian).
 
9. Osipova E.V., Guk V.G., Frolov A.A., Shepatkovskiy O.P., Papushina T.I. The investigation of damaged layers on the surface of lead telluride single crystals after different methods of cutting. Neorganicheskie materialy. 1991. 27, No. 6. P. 1200–1203 (in Russian).
 
10. Bochkin O.I., Bruk V.A., Nikiforova-Denisova S.N. Mechanical Treatment of Semiconductor Materials. Moscow: Vysshaia Shkola, 1983. 145 p. (in Russian).