@article{spqeo25n1p058,
  title = {Silicon nanowire arrays synthesized using the modified MACE process: Integration into chemical sensors and solar cells},
  author = {M.G. Dusheiko and V.M. Koval and T.Yu. Obukhova},
  journal = {Semiconductor Physics, Quantum Electronics \& Optoelectronics},
  year = {2022},
  volume = {25},
  number = {1},
  pages = {058--067},
  doi = {10.15407/spqeo25.01.058},
  url = {https://doi.org/10.15407/spqeo25.01.058},
  abstract = {In this work, the influence of the technological process for metal-assisted chemical etching on surface morphology and electrophysical properties of obtained nanostructures has been investigated. It has been demonstrated that the obtained structures with a high aspect ratio could be used both in sensors and solar cells. It has been shown that application of the metal-assisted chemical etching (MACE) process enables to significantly improve the short-circuit current density in silicon solar cells (up to 29 mA/cm2). Also, the possibility of detection of hydrogen peroxide and glucose (via enzymatic reaction) by resistor-like sensors with nanostructured silicon as the sensitive area has been demonstrated with the sensitivity up to 2.5…2.75 mA/V·\%.},
  keywords = {metal-assisted chemical etching, silicon nanowires, sensors, solar cells}
}