TY  - JOUR
AU  - M.G. Dusheiko
AU  - V.M. Koval
AU  - T.Yu. Obukhova
TI  - Silicon nanowire arrays synthesized using the modified MACE process: Integration into chemical sensors and solar cells
T2  - Semiconductor Physics, Quantum Electronics & Optoelectronics
PY  - 2022
VL  - 25
IS  - 1
SP  - 058
EP  - 067
DO  - 10.15407/spqeo25.01.058
UR  - https://doi.org/10.15407/spqeo25.01.058
AB  - In this work, the influence of the technological process for metal-assisted chemical etching on surface morphology and electrophysical properties of obtained nanostructures has been investigated. It has been demonstrated that the obtained structures with a high aspect ratio could be used both in sensors and solar cells. It has been shown that application of the metal-assisted chemical etching (MACE) process enables to significantly improve the short-circuit current density in silicon solar cells (up to 29 mA/cm2). Also, the possibility of detection of hydrogen peroxide and glucose (via enzymatic reaction) by resistor-like sensors with nanostructured silicon as the sensitive area has been demonstrated with the sensitivity up to 2.5…2.75 mA/V·%.
KW  - metal-assisted chemical etching
KW  - silicon nanowires
KW  - sensors
KW  - solar cells
ER  -