Semiconductor Physics, Quantum Electronics & Optoelectronics. 2005. V. 8, N 2. P. 037-040.
https://doi.org/10.15407/spqeo8.02.037

Investigation of Al-ZERODUR interface by Raman and secondary ion mass-spectroscopy
L.I. Berezhinsky, V.P. Maslov, V.V. Tetyorkin and V.A. Yukhymchuk

V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, prospect Nauky, 03028 Kyiv, Ukraine Phone: (38 044) 525-5778

Abstract. The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed.

Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy.

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