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Semiconductor Physics, Quantum Electronics & Optoelectronics. 2008. V. 11, N 2. P. 171-177.
The resolution function and effective response
of piezoelectric thin films in Piezoresponse Force Microscopy
V. Lashkaryov Institute of Semiconductor Physics, National Academy of Science of Ukraine,
45, prospect Nauky, 03028 Kyiv, Ukraine; e-mail: morozo@i.com.ua
Abstract. The elastic Green function and resolution function in Piezoresponse Force
Microscopy (PFM) of thin piezoelectric film capped on the rigid substrate are derived.
The extrinsic size effect on the resolution function is demonstrated.
Keywords: Piezoresponse Force Microscopy, thin piezoelectric films, resolution
function.
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