Semiconductor Physics, Quantum Electronics & Optoelectronics. 2010. V. 13, N 2. P. 137-141.
https://doi.org/10.15407/spqeo13.02.137

Composite nanostructure of vertically aligned carbon nanotube array and planar graphite layer obtained by the injection CVD method
V.A. Labunov1, B.G. Shulitski1, A.L. Prudnikava1, Y.P. Shaman1, A.S. Basaev2

1The Belarusian State University of Informatics and Radioelectronics, Laboratory of Integrated Micro- and Nanosystems, Minsk, 220013 Belarus, Phone/Fax: +375 17 202-10-05
2Technological Center, Moscow State Institute of Electronic Technology, Moscow, K-498, 103498 Russia, Phone: +7(095) 532-8906; fax: +7(095) 913-2192

Abstract. The carbon nanostructure composed of an array of vertically aligned carbon nanotubes (CNTs) and a planar graphite layer (PGL) located at the top of the array has been obtained by the injection chemical vapor deposition method, realized using high temperature catalytic pyrolysis of xylene-ferrocene mixture. The carbon nature of the planar layer was identified using Auger electron spectroscopy. Scanning electron microscopy analysis enabled to ascertain peculiarities of CNT-PGL nanostructure morphology, in particular, the internal layer-built structure of PGL and its links with the underlying CNT array. The mechanism of CNT-PGL nanostructure formation was considered.

Keywords: carbon nanotubes, graphite, graphene, chemical vapor deposition, ferrocene, xylene.

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