@article{Kidalov2023_140,
  author = {Kidalov, V.V. and Dyadenchuk, A.F. and Baturin, V.A. and Karpenko, O. Yu. and Kolomys, O.F. and Ponomarenko, V.V. and Maksimenko, Z.V. and Strelchuk, V.V. and Bacherikov, Yu.Yu. and Okhrimenko, O.B.},
  title = {Formation of ZnO films on SiC/porous Si/Si substrates},
  journal = {Semiconductor Physics, Quantum Electronics \& Optoelectronics},
  year = {2023},
  volume = {26},
  number = {2},
  pages = {140--146},
  doi = {10.15407/spqeo26.02.140},
  url = {https://doi.org/10.15407/spqeo26.02.140},
  keywords = {reactive magnetron sputtering, porous Si, silicon carbide film, chemical substitution of atoms, Raman and photoluminescence spectra}
}