TY  - JOUR
TI  - Structural evolution of Fe/Pt multilayered films annealed in
      different atmospheres: a synchrotron radiation study
T2  - Semiconductor Physics, Quantum Electronics & Optoelectronics
AU  - O.A. Palchekovskyi
AU  - I.O. Kruhlov
AU  - R.V. Pedan
AU  - I.A. Vladymyrskyi
AU  - A.K. Orlov
VL  - 29
IS  - 2
SP  - 153
EP  - 161
PY  - 2026
DA  - 2026
AB  - Influence of annealing atmosphere on the structural properties of
      annealed multilayered [Fe/Pt]×4 thin films was investigated. The
      films were deposited onto thermally-oxidized SiO2(100nm)/Si(100)
      substrates by direct current magnetron sputtering at room
      temperature and subsequently annealed in a temperature range of 500
      to 900 °C in flowing Ar, N2, and Ar + H2 atmospheres to induce
      structural phase transitions and chemical ordering. Synchrotron
      analysis revealed that ordered face-centered tetragonal L10-FePt
      phase formed after annealing at 500 °C regardless of the atmosphere
      used. Among the studied conditions, annealing in N2 at 800 °C
      provided higher degree of chemical ordering, strong [001]
      crystallographic texture, and higher tetragonality of the L10-FePt
      phase, making the latter the most favorable for magnetic data
      storage applications. The surface roughness increased at rising the
      temperature. However, its magnitude also depended on the annealing
      atmosphere, being comparatively lower after annealing in Ar compared
      to treatment in reactive environments such as N2 or Ar + H2.
      Furthermore, annealing in Ar atmosphere promoted formation of a
      non-stoichiometric Fe1+xPt3–x solid solution and surface oxides
      (Fe3O4 → Fe2O3 → FeO) alongside with the L10-FePt phase.
KW  - magnetic thin films
KW  - Fe–Pt alloy
KW  - synchrotron radiation
KW  - annealing atmosphere
KW  - oxidation behavior
DO  - 10.15407/spqeo29.02.153
UR  - http://journal-spqeo.org.ua/n2_2026/v29n2-p153-161.pdf
ER  -