Semiconductor Physics, Quantum Electronics & Optoelectronics. 2001. V. 4, N 3. P. 177-181.

Abstract. Bolometric characteristics of macroporous silicon were investigated. Ohmic structures of the type «In/n-Si» and «In/macroporous n-Si» were formed by thermal evaporation of indium in an atmosphere of hydrogen. Temperature dependencies of electron conductivity, concentration and mobility in macroporous silicon emulate the temperature curves of the corresponding parameters for crystalline silicon. The investigated macroporous silicon structures are promising material for multi-element thermal sensor fabrication due to a high temperature coefficient of electrical resistance (1-4%), low noise level (2*10^-9 VHz^-1/2) and good radiation absorption in the operation spectral region.

Keywords: macroporous silicon, electrochemical process, bolometric characteristics, thermal sensor.

Paper received 29.01.01; revised manuscript received 12.03.01; accepted for publication 13.07.01.