https://doi.org/10.15407/spqeo2.03.071
PACS 07.07.D, 42.79.P,Q
Optoelectronic sensor of longitudinal and angular displacements
A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski
Semiconductor Physics, Quantum Electronics and Optoelectronics - 1999. - 2, ¹3. - P.71-73. - Engl. Il.: 6. Ref.: 5.
Abstract. In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving head. An accuracy of displacement measurements depends on parameters of a beam illuminating a surface being displaced, parameters of a position sensitive detector and on a signal-to-noise ratio of a signal analog processing block. Results of investigations of uncertainties of lathe slide shifts are also presented.
Keywords: optoelectronic sensor, position-sensitive detector, longitudial displacement, angular displacement
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