Semiconductor Physics, Quantum Electronics & Optoelectronics. 2012. V. 15, N 4. P. 360-364.
DOI: https://doi.org/10.15407/spqeo15.04.360

Spectral-ellipsometric examining the films of gold nanoparticles on Si/SiO2 substrate
E.G. Bortchagovsky1, V.Z. Lozovski2, T.O. Mishakova2, K. Hingerl3

1V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, 41, prospect Nauky, 03028 Kyiv, Ukraine
2Institute of High Technologies, Taras Shevchenko Kyiv National University, 64, Volodymyrska str., 01601 Kyiv, Ukraine
3Zentrum für Oberflächen- und Nanoanalytik, Johannes Kepler Universität Linz, Altenberger Str., 69, 4040 Linz, Austria; e-mail: birtch@yahoo.com

Abstract. . We have investigated optical properties of films of gold nanoparticles on Si/SiO2 substrate by using the method of spectroscopic ellipsometry in dependence on morphology of the films. Different morphology of the films was obtained by flash-annealing at various temperatures of identical sputtered thin gold layers. Ellipsometric spectra were compared with account of pictures of the films obtained by scanned electron microscopy. Remarkable dependence of depolarization of the reflected light with the frequency of localized plasmon resonance versus the film morphology was found.

Keywords: spectroscopic ellipsometry, nanoparticles, annealing, depolarization, plasmon.

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