@article{Lytvyn2023388Nanomechanical,
  author = {P.M. Lytvyn and V.M. Dzhagan and M.Ya. Valakh and A.A. Korchovyi and O.F. Isaieva and O.A. Stadnik and O.A. Kulbachynskyi and O.Yo. Gudymenko and B.M. Romanyuk and V.P. Melnik},
  title = {Nanomechanical properties of polycrystalline vanadium oxide thin films of different phase composition},
  journal = {Semiconductor Physics, Quantum Electronics \textbackslash{}\& Optoelectronics},
  year = {2023},
  volume = {26},
  number = {4},
  pages = {388--397},
  doi = {10.15407/spqeo26.04.388},
  url = {https://doi.org/10.15407/spqeo26.04.388},
  abstract = {Vanadium oxide (VO x ) thin films are promising materials, exhibiting electrical, optical, and mechanical properties highly tunable by processing and structure. This work uniquely applying atomic force microscopy (AFM) nanoindentation correlated with X-ray diffractometry and Raman spectroscopy structural analysis to investigate the intricate connections between VO x post-annealing, phase composition, and resulting nanoscale mechanical functionality. Utilizing an ultra-sharp diamond tip as a nanoscale indenter, indentation is performed on VO x films with systematic variations in structure – from mixed insulating oxides to VO 2 -dominated films. Analytical modeling enables extraction of hardness and elastic modulus with nanoscale resolution. Dramatic mechanical property variations are observed between compositions, with order-of-magnitude increases in hardness and elastic modulus for the VO 2 -rich films versus insulating oxides. Ion implantation further enhances nanomechanical performance through targeted defect engineering. Correlating indentation-derived trends with detailed structural and morphological characterization elucidates explicit structure-property relationships inaccessible by other techniques. The approach provides critical mechanics-driven insights into links between VO x synthesis, structure evolution, and property development. Broader implementation will accelerate processing optimization for electronics and advanced fundamental understanding of nanoscale structure-functionality relationships},
  keywords = {polycrystalline vanadium oxide thin films, phase composition, atomic force microscopy, nanoindentation, X-ray diffraction, Raman spectroscopy, defect engineering, ion implantation}
}