@article{Ievtushenko2023398Substrate,
  author = {A.I. Ievtushenko and V.A. Karpyna and O.I. Bykov and M.V. Dranchuk and O.F. Kolomys and D.M. Maziar and V.V. Strelchuk and S.P. Starik and V.A. Baturin and О.Y. Karpenko and O.S. Lytvyn},
  title = {The influence of substrate temperature on the structure and optical properties of NiO thin films deposited using the magnetron sputtering in the layer-by-layer growth regime},
  journal = {Semiconductor Physics, Quantum Electronics \textbackslash{}\& Optoelectronics},
  year = {2023},
  volume = {26},
  number = {4},
  pages = {398--407},
  doi = {10.15407/spqeo26.04.398},
  url = {https://doi.org/10.15407/spqeo26.04.398},
  abstract = {Vanadium oxide (VO x ) thin films are promising materials, exhibiting electrical, optical, and mechanical properties highly tunable by processing and structure. This work uniquely applying atomic force microscopy (AFM) nanoindentation correlated with X-ray diffractometry and Raman spectroscopy structural analysis to investigate the intricate connections between VO x post-annealing, phase composition, and resulting nanoscale mechanical functionality. Utilizing an ultra-sharp diamond tip as a nanoscale indenter, indentation is performed on VO x films with systematic variations in structure – from mixed insulating oxides to VO 2 -dominated films. Analytical modeling enables extraction of hardness and elastic modulus with nanoscale resolution. Dramatic mechanical property variations are observed between compositions, with order-of-magnitude increases in hardness and elastic modulus for the VO 2 -rich films versus insulating oxides. Ion implantation further enhances nanomechanical performance through targeted defect engineering. Correlating indentation-derived trends with detailed structural and morphological characterization elucidates explicit structure-property relationships inaccessible by other techniques. The approach provides critical mechanics-driven insights into links between VO x synthesis, structure evolution, and property development. Broader implementation will accelerate processing optimization for electronics and advanced fundamental understanding of nanoscale structure-functionality relationships},
  keywords = {polycrystalline vanadium oxide thin films, phase composition, atomic force microscopy, nanoindentation, X-ray diffraction, Raman spectroscopy, defect engineering, ion implantation}
}