Semiconductor Physics, Quantum Electronics & Optoelectronics. 2010. V. 13, N 1. P. 024-029.
Silicon carbide defects and luminescence centers
in current heated 6H-SiC
1Department of Physics, Dongguk University, Pildong 3-26, Chung-ku, Seoul 100-715, Korea
Abstract. At room temperature yellow photoluminescence with a broad peak of 2.13 eV
is a well-known feature of boron-doped 6H-SiC. Usually yellow luminescence is
regarded as recombination involving both the boron-related deep acceptor and donor
level. But the nature of the deep level has not been clearly understood yet. We annealed
6H-SiC substrates by current in vacuum without boron injection at the temperature of
1350 and 1500 ºC. We received red and yellow luminescence in PL spectrum for the
heated 6H-SiC. The luminescence was regarded as donor-acceptor pair recombination
involving the deep aluminum acceptor related to the adjacent carbon vacancies and
nitrogen donor or the formation of quantum well like regions of 3C-SiC in 6H-SiC
matrix.
Keywords: luminescence center, silicon carbide, stacking faults, donor acceptor pair.
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