Semiconductor Physics, Quantum Electronics & Optoelectronics, 25 (1), P. 058-067 (2022).
DOI: https://doi.org/10.15407/spqeo25.01.058
Silicon nanowire arrays synthesized using the modified MACE process: Integration into chemical sensors and solar cells
National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”, Abstract.
In this work, the influence of the technological process for metal-assisted chemical etching on surface morphology and electrophysical properties of obtained nanostructures has been investigated. It has been demonstrated that the obtained structures with a high aspect ratio could be used both in sensors and solar cells. It has been shown that application of the metal-assisted chemical etching (MACE) process enables to significantly improve the short-circuit current density in silicon solar cells (up to 29 mA/cm2). Also, the possibility of detection of hydrogen peroxide and glucose (via enzymatic reaction) by resistor-like sensors with nanostructured silicon as the sensitive area has been demonstrated with the sensitivity up to 2.5…2.75 mA/V·%.
Keywords:metal-assisted chemical etching, silicon nanowires, sensors, solar cells.
M.G. Dusheiko, V.M. Koval, T.Yu. Obukhova
Microelectronic department
37, prospect Peremohy, 03056 Kyiv, Ukraine
E-mail: t.y.obukhova@gmail.com; pvlab_kpi@ukr.net
This work is licensed under a Creative Commons Attribution-NoDerivatives 4.0 International License.