Semiconductor Physics, Quantum Electronics & Optoelectronics, 26 (1), P. 017-024 (2023).
DOI: https://doi.org/10.15407/spqeo26.01.017

References

1. Molodkin V.B., Storizhko V.Yu., Kladko V.P. et al. New possibilities for phase-variation structural diagnostics of multiparametrical monocrystalline systems with defects. SPQEO. 2021. 24, No 1. P. 5–15. https://doi.org/10.15407/spqeo24.01.005 .

2. Voronkov S.N., Chukhovskii F.N., Lomovtsev P.V., and Darbinyan S.P. X-ray diffraction investigation of Si ๑rystals with randomly distributed microdefects by the inclination method. phys. status solidi (a). 1992. 134. P. 301–316. https://doi.org/10.1002/pssa.2211340202 .

3. Schneider J.R., Bouchard R., Graf H.A., Nagasawa H. Experimental tests of the statistical dynamical theory. Acta Crystallogr. A. 1992. 48, No 6. P. 804–819. https://doi.org/10.1107/S0108767392003726 .

4. Li Z., Will J., Dong P., and Yang D. Sample thickness effect of thermal vibration collection within X-ray dynamical theory for germanium-doped silicon. J. Appl. Phys. 2017. 121, Issue 12. P. 125704. https://doi.org/10.1063/1.4979307 .

5. Takama T. and Harima H. Experimental verification of the statistical dynamical theories of diffraction. Acta Crystallogr. A. 1994. 50. P. 239–246. https://doi.org/10.1107/S010876739300995X .

6. Stevenson A.W. X-ray integrated intensities from semiconductor substrates and epitaxic layers – a com-parison of kinematical and dynamical theories with experiment. Acta Crystallogr. A. 1993. 49. P. 174–183. https://doi.org/10.1107/S0108767392007438 .

7. Patric W., Hearn E., Westdorp W., and Bohg A. Oxygen precipitation in silicon. J. Appl. Phys. 1979. 50, No 11. P. 7156. https://doi.org/10.1063/1.325825 .

8. Molodkin V.B., Olikhovskii S.I., Dmitriev S.V. et al. Dynamical effects in the integrated X-ray scattering intensity from imperfect crystals in Bragg diffraction geometry. I. Semi-dynamical model. Acta Crystallogr. A. 2020. 76. P. 45–54. https://doi.org/10.1107/S2053273319014281 .

9. Molodkin V.B., Olikhovskii S.I., Dmitriev S.V., Lizunov V.V. Dynamical effects in the integrated X-ray scattering intensity from imperfect crystals in Bragg diffraction geometry. II. Dynamical theory. Crystallogr. A. 2021. 77. P. 433–452. https://doi.org/10.1107/S2053273321005775 .