Semiconductor Physics, Quantum Electronics and Optoelectronics, 5 (2) P. 180-182 (2002).


References

1. M. Shur, GaAs Devices and Circuits, Plenum Press, New York and London (1987).
https://doi.org/10.1007/978-1-4899-1989-2
2. GaAs Microelectronics (VLSI Electronics Microstructure Science, v. 11), Eds. N.G. Einspruch, W.R. Wisseman, Academic Press, New York (1985).
3. V.I. Osinskii, M.A. Stovpovoi, Study of planar contacts to the quantum-sized nanolayers of n-GaAs-n-GaAs-n-GaAlAs- n+-GaAlAs-n+-GaAs heterostructures // Optoelektronika i Poluprovodnikovaya Tekhnika, 29, pp.18-24 (1995) (in Russian).
4. Yu.A. Goldberg, Metal-AIIIBV semiconductor ohmic contact: formation techniques and properties // Fiz. Tekh. Poluprov.,28(10), pp.1681-1698 (1994) (in Russian).
5. A. Piotrowska, A. GuivarcĂ­h, G. Pelous. Ohmic contacts to III-V compound semiconductors: A review of fabrication techniques // Solid-St. Electron., 26(3), pp.179-197 (1983).
https://doi.org/10.1016/0038-1101(83)90083-7
6. GaAs FET Principles and Technology, Eds. J.D. DiLorenzo, D.D. Khandelwal, Artech House, Inc. (1984).
7. S.J. Lee, C.R. Crowell, Parasitic source and drain resistance in high-electron-mobility transistors, Solid-St. Electronics, 28(7), pp.659-668 (1985).
https://doi.org/10.1016/0038-1101(85)90016-4
8. K. Ikossi-Anastasiou, A. Ezis, A. Rai, Temperature dependence of transient and conventional annealed AlGaAs/GaAs MODFET ohmic contacts // IEEE Trans. Electron Devices, ED-35(11),pp.1786-1792 (1988).
https://doi.org/10.1109/16.7388
9. S.N. Madayan, M.P. Guseinkhanov, Resistivity measurements for ohmic contacts with a thin semiconductor layer // Izv.Vuzov. Fizika, No 6, pp.80-83 (1976) (in Russian).