PACS: 81.05.Je

Ellipsometric control of quality of polished MgF2 optical ceramics
V.P. Maslov, A.Z. Sarsembaeva, F.F. Sizov

V. Lashkaryov Institute of Semiconductor Physics, National Academy of Sciences of Ukraine
41, prospect Nauky, 03028 Kyiv, Ukraine
Phone/fax: +380 (44) 265 0555, E-mail: maslov@isp.kiev.ua, sizov@isp.kiev.ua

Abstract. In this work, ellipsometric measurements were used to optimise the technology of machine working the polished parts made of MgF2 optical ceramics. The ellipsometry is a high-performance contactless method to control quality of optical surfaces, which is used here due to a sharp response of light polarisation conditions to the properties and parameters of surface and subsurface layers in investigated reflective systems. It is shown that the highly productive technology of diamond polishing provides achievement of ellipsometric parameters at a level of conventional methods of polishing.
Keywords: ellipsometric control, diamond polishing, optical ceramics.
Paper received 16.12.03; accepted for publication 17.06.04.

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