Semiconductor Physics, Quantum Electronics & Optoelectronics. 2009. V. 12, N 2. P. 125-128.
https://doi.org/10.15407/spqeo12.02.125

Chemical treatment of monocrystalline cadmium telluride and Cd1-xMnxTe solid solutions by Н2О2–НІ–citric acid etchant compositions
R.O. Denysyuk1, V.M. Tomashik2, Z.F. Tomashik2, O.S. Chernyuk1, V.I. Grytsiv1

1Ivan Franko Zhytomyr State University, 40, V. Berdychivs’ka str., 10001 Zhytomyr, Ukraine
2V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, prospect Nauky, 03028 Kyiv, Ukraine Phone: +380 (44)-525 22 01

Abstract. Dissolution of CdTe and Cd 1-x Mn x Te single crystals in aqueous solutions of Н 2 О 2 –НІ–citric acid system has been studied. The surfaces of equal etching rates were constructed and the limiting stages of the dissolution process were ascertained. Also determined were the concentration limits for the solutions that can be used for chemical polishing the above-mentioned semiconductor materials.

Keywords: cadmium telluride, chemical dissolution, citric acid, semiconductor, etching rate, solid solution.

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