https://doi.org/10.15407/spqeo5.03.288
Semiconductor Physics, Quantum
Electronics & Optoelectronics. 2002. V. 5, N 3. P. 288-293.
PACS: 78.30.-j
Modelling optical spectra and obtaining information on parameters and features of semiconductor structures
Penza State University, Microelectronics
Department, 40 Krasnaya st., 440017 Penza, Russia
E-mail: paspen@rambler.ru
Abstract.
Problems of semiconductor optical spectrum identification are considered
in the paper. Some models for description of optical reflection spectra
in semiconductors and semiconductor structures are presented. Shown is
the possibility to obtain information upon various parameters and characteristics
of semiconductors and their structures by fitting theoretical spectra
to experimental data. The estimation of validity and accuracy of obtained
information is given.
Keywords: semiconductors,
optical reflection spectra, semiconductor structures.
Paper received 06.03.02; revised manuscript
received 28.06.02; accepted for publication 10.12.02.
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