https://doi.org/10.15407/spqeo6.03.354
Semiconductor Physics, Quantum Electronics & Optoelectronics. 2003. V. 6, N 3. P. 354-356.
PACS: 42.79.Wc
Optical characteristics of Al2O3 oxide coatings on copper mirrors made by diamond microgrinding
V.A. Odarich, L.V. Poperenko,
V.S. Staschuk, Y.V. Filipov
National Taras Shevchenko University of
Kyiv, 6 Glushkova Prosp., 03127 Kyiv, Ukraine
e-mail: fyv@ukr.net
Abstract. Ellipsomety examination of dielectric sheetings and measured of reflection
spectrum at normal incidence there carried out. A film of Al2O3 on a surface of copper mirrors of a diamond microgrinding was deposited.
The thickness and index of refraction of coatings are determined.
Keywords: reflectivity, parameters of ellipsomerty, index of refraction, copper
mirrors, aluminium oxide, diamond microgrinding.
Paper received 28.12.02; revised manuscript
received 10.06.03; accepted for publication 17.06.03.
Download
full text in PDF [PDF
156K]
This work is licensed under a Creative Commons Attribution-NoDerivatives 4.0 International License.