Semiconductor Physics, Quantum Electronics & Optoelectronics. 2008. V. 11, N 3. P. 252-256.
https://doi.org/10.15407/spqeo11.03.252

Investigations of surface morphology and chemical composition of Ag/ZnS/glassceramic thin-film structure
D. Kurbatov1, A. Opanasyuk1, V. Denisenko2, A. Kramchenkov2, M. Zaharets2

1Sumy State University, Department of General and Experimental Physics, 2, Rimsky-Korsakov str., 40007 Sumy, Ukraine, e-mail: kurd@ukr.net
2Applied Physics Instiute, 58, Petropavlovskaya str., 40030 Sumy, Ukraine

Abstract. The surface morphology and chemical composition of Ag/ZnS/glassceramic thin-film system obtained by close-spaced vacuum sublimation technique under different grow conditions were investigated. Examination of surface profile and morphology was performed by scanning electron and optical microscopy. Chemical composition was studied by Rutherford back scattering method. Results of morphology studies enabled to determine dependence of the growth mechanism, roughness R a , grain size D of ZnS layers on the growth conditions. The researches of chemical composition allowed to determine the concentration of compound elements and impurities, deviation from stoichiometry and thickness distribution of chemical elements.

Keywords: zinc sulfide, thin films, surface morphology, roughness, Rutherford backscattering spectroscopy, chemical composition, thickness distribution.

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