Semiconductor Physics, Quantum Electronics & Optoelectronics. 2011. V. 14, N 3. P. 298-301.
Anti-reflection coatings based on SnO2, SiO2, Si3N4 films for
photodiodes operating in ultraviolet and visible spectral ranges
1Scientific and developed firm “Tenzor” Ltd., Chernivtsi, Ukraine
Abstract.
It is shown in this paper that tin dioxide coating is suitable to enhance
sensitivity of photodiodes operating in the ultraviolet spectral range and based on zinc
selenide and gallium phosphide. For these materials, the sensitivity values have been
increased up to 0.12 and 0.2 A/W, respectively, in the maxima of their spectral
characteristics. It is also shown that the film silicon nitride – silicon dioxide a bit better
clarifies silicon photodiode, especially at the wavelength 700 nm. A gluing composition,
in general, worsens transmission of films, and to greater extent transmission of the above
film.
Keywords: anti-reflection coating, photodiode, ultraviolet, gallium phosphide, zinc
selenide.
|