Semiconductor Physics, Quantum Electronics and Optoelectronics, 4 (4) P. 318-322 (2001).
References
1. V.I. Lavrenyuk, V.A. Makara, Heat-strained state of a multilayer semiconductor structure // Problemy Prochnosti, N 10, pp. 116-120 (1983) (in Russian). https://doi.org/10.1007/BF01523337
2. T. Suzuki, A. Mimura, T. Ogawa, The deformation of polycrystalline silicon deposited on oxide-covered single-crystal silicon substrates // J. Electrochem. Soc., 124(11), pp.1777-1782 (1977). https://doi.org/10.1149/1.2133155
3. E.A. Boguslavsky, An equation for shrinkage deflection in the layered silicon single crystal-oxide-polycrystal heterostructures // Elektronnaya Tekhnika, Ser.6, N 7, pp. 81-87(1976) (in Russian).