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Semiconductor Physics, Quantum Electronics & Optoelectronics. 2008. V. 11, N 4. P. 319-323.
Electrical and light-emitting properties of silicon dioxide
co-implanted by carbon and silicon ions
V.E. Lashkarev Institute of Semiconductor Physics NAS Ukraine,45, prospekt Nauki,03028 Kiev, Ukraine
Abstract. In this paper we explore the electrophysical and electroluminescence (EL)
properties of thermally grown 350 nm thick SiO 2 layers co-implanted with Si + and C +
ions. The implanting fluencies were chosen in such a way that the peak concentration of
excess Si and C of 5-10 at.% were achieved. Effect of hydrogen plasma treatment on
electroluminescent and durability of SiO 2 (Si,C) - Si-system is studied. Combined
measurements of charge trapping and EL intensity as a function of the injected charge
and current have been carried out with the aim of clarifying the mechanisms of
electroluminescence. EL was demonstrated to have defect-related nature. Cross sections
of both electron traps and hole traps were determined. EL quenching at a great levels of
injected charge is associated with strong negative charge capture, following capture of
positive charge leading to electrical breakdown of SiO 2 structures.
Keywords: electroluminescence, MOS – structure, implantation, EL quenching.
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