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Semiconductor Physics, Quantum Electronics & Optoelectronics. 2008. V. 11, N 4. P. 396-399.
Optical properties of diamond-like carbon films
subjected to ultraviolet irradiation
V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine
41, prospect Nauky, 03028 Kyiv, Ukraine; phone/fax: +38(044)525-62-02
E-mail: klyui@isp.kiev.ua, lvg@isp.kiev.ua, lukyanov@isp.kiev.ua
Abstract. Influence of UV irradiation on optical properties of the nitrogen doped
diamond-like carbon (DLC) films was studied. Transparency spectra of the initial, UV
irradiated and concentrated UV irradiated films were measured. Dependences of the
optical bandgap on the nitrogen content were obtained from these spectra. Raman
measurements revealed a decrease in the graphitic cluster size by two times after UV
irradiation. It was shown that concentrated UV irradiation leads to smaller changes in
comparison with nonconcentrated UV. Physical mechanism of air oxygen embedding
into the DLC structure under UV irradiation is proposed to explain the changes in the
properties of the films.
Keywords: diamond-like carbon film, ultraviolet irradiation, optical properties.
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