Semiconductor Physics, Quantum Electronics & Optoelectronics, 21 (4), P. 417-423 (2018).
DOI: https://doi.org/10.15407/spqeo21.04.417


Optical properties of ternary alloys MgZnO in infrared spectrum
E.F. Venger1, I.V. Venger1, N.O. Korsunska1, L.Yu. Melnichuk2, O.V. Melnichuk2, L.Yu. Khomenkova1

1V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine, 41, prosp. Nauky, 03680 Kyiv, Ukraine
2Mykola Gogol State University of Nizhyn, 2, Hrafska str., 16600 Nizhyn, Ukraine E-mail: mov310310@gmail.com

Abstract. Properties of thin films of ternary alloys Mg х Zn 1–х O on the optically-anisotropic Al 2 O 3 substrates in the area of “residual rays” of film and substrate are first investigated using the method of infrared spectroscopy and dispersion analysis of reflection coefficients. It was established that the changes in thickness of film and content of Mg substantially deform the spectrum of reflection in the area of “residual rays” of film and substrate, decrease the reflectivity. First by means of Kramers–Kronig relations with use of the method of dispersion analysis of infrared reflection spectra, the static dielectric constant of Mg х Zn 1–х O structure has been obtained at different values of х, when orientation is Е⊥С. It was ascertained that the Mg х Zn 1–х O/Al 2 O 3 structures are well modelled when using the mutually agreed parameters, obtained earlier for the single crystals of magnesium oxide, zinc oxide and leicosapphire at the orientation Е⊥С. It was theoretically shown and experimentally grounded the assurance of the obtained optical parameters of Mg х Zn 1–х O films by the non-destructive method of infrared spectroscopy in the wide spectral range. The obtained results are well agreed with the literature data.

Keywords: optical properties, ternary alloys, MgZnO, infrared spectrum, infrared spectroscopy, dispersion analysis of reflection coefficients.

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