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Semiconductor Physics, Quantum Electronics & Optoelectronics. 2011. V. 14, N 2. P. 145-151.
Optimal solution in producing 32-nm CMOS technology transistor
with desired leakage current
1Institute of Microengineering and Nanoelectronic University Kebangsaan Malaysia (UKM),
43600 Bangi, Selangor, Malaysia,
E-mail: hus_7119@yahoo.com; burhan@eng.ukm.my;
Abstract.
The objective of this paper is to optimize the process parameters of 32-nm
CMOS process to get minimum leakage current. Four process parameters were chosen,
namely: (i) source-drain implantation, (ii) source-drain compensation implantation,
(iii) halo implantation time, and (iv) silicide annealing time. The Taguchi method
technique was used to design the experiment. Two noise factors were used that consist of
four measurements for each row of experiment in the L 9 array, thus leading to a set of
experiments consisting of 36 runs. The simulator of ATHENA and ATLAS were used for
MOSFET fabrication process and electrical characterization, respectively. The results
clearly show that the compensation implantation (46%) has the most dominant impact on
the resulting leakage current in NMOS device, whereas source-drain (S/D) implantation
was the second ranking factor (35%). The percent effects on signal-to-noise ratio (SNR)
of silicide annealing temperature and halo implantation are much lower being 12% and
7%, respectively. For the PMOS device, halo implantation was defined as an adjustment
factor because of its minimal effect on SNR and highest on the means (43%). Halo
implantation doping as the optimum solution for fabricating the 32-nm NMOS transistor
is 2.38×10 13 atom/cm 3 . As conclusion, this experiment proves that the Taguchi analysis
can be effectively used in finding the optimum solution in producing 32-nm CMOS
transistor with acceptable leakage current, well within International Technology
Roadmap for Semiconductor (ITRS) prediction.
Keywords: 32-nm device, halo, compensation implant, leakage current, Taguchi method.
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