Semiconductor Physics, Quantum Electronics & Optoelectronics. 2011. V. 14, N 3. P. 334-338.
Effect of magnetic field on the reconstruction of the defect-impurity
state and сathodoluminescence in Si/SiO2 structure
1Taras Shevchenko Kyiv National University, Department of Physics,
64, Volodymyrs’ka str., 01601 Kyiv, Ukraine,
Abstract.
Impurity states in Si/SiO 2 structure have been studied using
cathodoluminescence (CL). It has been found that intrinsic structure defects in Si/SiO 2
are sensitive to the action of magnetic field, which can be revealed due to changes in
Si/SiO 2 optical properties. The most sensitive to magnetic field (about 35 per cent) is the
intensity of the 1.9 eV CL band attributed to non-bridge oxygen atoms.
Keywords: silicon, defects, magnetic field, cathodoluminescence.
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