Semiconductor Physics, Quantum Electronics & Optoelectronics. 2016. V. 19, N 3. P. 295-298.
Electrical properties of InSb p-n junctions prepared
by diffusion methods
11V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine,
41, prospect Nauky, 03028 Kyiv, Ukraine
Abstract. InSb p-n junctions were prepared by three diffusion methods, including isothermal, two-temperature and two-stage diffusion processes. The current-voltage characteristics were measured as a function of temperature and bias voltage. The highest values of the resistance-area product at zero bias have been obtained for the junctions prepared using the two-stage diffusion process.
Keywords: InSb, photodiode, two-stage diffusion, annealing.
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