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Semiconductor Physics, Quantum Electronics & Optoelectronics. 2006. V. 9, N 4. P. 052-057.
A novel numerical approach for the modelling of the square shaped silicon membrane
Laboratory of Microsystems and Instrumentation, University Mentouri - Constantine
Route d’ Ain El Bey, 25000 Constantine, Algérie
Phone: 070 93 20 92, fax: 00 213 31 81 90 10,
E-mail: fouadkerrour@caramail.com; f.hobar@caramail.com
Abstract. In this paper, we are interested in solving the Lagrange partial differential
equation of the fourth order, which governs the deformation of a thin silicon square
membrane, perfectly embedded and subjected to a uniform static pressure in the case of
the weak disturbances. The proposed approach that consists of using the Galerkin method
with trigonometrical basis functions is simple, easy to implement and ensures a good
stability of the algorithm and a satisfactory accuracy.
Keywords: constraints, deformation, membrane, the Galerkin method.
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